SiC wafer processing heater lamp

Mon, 01 Jun 2026 18:06:12 +0800

On the fab floor, SiC wafers don’t give you any room to play with temperature. A 2°C swing during the photoresist bake is enough to throw overlay off, and a sloppy lamp profile will kill an entire lot. We built our SiC wafer processing heater lamp to live in that reality. What matters, technically We run short-wave infrared halogen emitters in a quartz envelope, tuned to match SiC absorption so the wafer heats fast and stays stable. Across the bake zone, we hold wafer-level uniformity within ±0.1°C, and cycle-to-cycle repeatability within ±0.5°C. Cleanroom behavior is engineered in: Class 1–100 compliant materials, no particle generation during thermal cycling, and a low-outgassing design that keeps contamination out of the chamber. You get fast ramp rates without blowing your thermal budget, and the system is built to run 24/7 with a reliability profile that supports zero unplanned downtime. Why it plays in lithography In the track, this lamp delivers consistent soft bake and hard bake profiles on SiC, so you don’t lose critical dimension control or yield. Tight thermal uniformity keeps edge bead and resist defects down, and repeatable bake temperature cuts rework and improves line-of-sight process capability. The infrared coupling is efficient and the dwell control is precise, so you end up using less energy. Maintenance intervals stretch out, too, thanks to emitter life and a modular layout. What you need to get right Installation comes down to matching the lamp footprint and interface to your track tool, then confirming voltage and connector specs against the cabinet supply. The lamp stays within spec when chamber pressure and gas flow stay inside the defined envelope; drift outside those bounds and you’ll see uniformity and ramp rate slip. Set it up with your maintenance team up front, and line up bake recipes, temperature setpoints, and interlock logic before you run product.

SiC on Warm IR Heating Equipment

SiC wafer processing heater lamp